Equipment Others, Optical Surface Inspection
Fastmicro Sample Scanner
Surface cleanliness validation with 0.5 µm particle detection, objective reports and fast operator workflow.
INFODiscover Lumina Innovative Optical Inspection Systems for full-surface defect detection, mapping, and classification on transparent, translucent, and opaque substrates as well asPhaosTech Optical Microscopes.
Surface cleanliness validation with 0.5 µm particle detection, objective reports and fast operator workflow.
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All-surface contamination and defectivity inspection and imaging for wafers, reticles, and panel level substrates, ≤ 600...
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Subsurface defect inspection and classification for silicon carbide (SiC) and gallium nitride (GaN) based wafers and...
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All-surface contamination and defectivity inspection and imaging for wafers, reticles, and panel level substrates, 100–450 mm,...
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